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Proceedings Paper

Laser micromachining of transparent glass using ultrafast Bessel beams
Author(s): Véronique Zambon; Nathalie McCarthy; Michel Piché
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Paper Abstract

We fabricated optical waveguides in fused silica by focusing femtosecond laser pulses with an axicon. With this technique, we also produced microholes by using chemical etching. The axicon, which is a conical lens, generates an optical beam with a transverse intensity profile that follows a zero-order Bessel function. Bessel beams produced by axicon focusing have a narrow focal line of a few micron width which is invariant along a long distance (>1 cm). By focusing femtosecond pulses with an axicon into fused silica, we induced permanent modifications over the extented focal line of the axicon without scanning axially the glass sample. The waveguides so fabricated exhibit low losses and no detectable birefringence due their excellent circular symmetry. By translating the glass sample during the inscription process, we have fabricated planar waveguides. Microfluidic channels were obtained by soaking the exposed samples into a HF solution.

Paper Details

Date Published: 4 August 2009
PDF: 5 pages
Proc. SPIE 7386, Photonics North 2009, 738632 (4 August 2009); doi: 10.1117/12.839520
Show Author Affiliations
Véronique Zambon, COPL, Univ. Laval (Canada)
Nathalie McCarthy, COPL, Univ. Laval (Canada)
Michel Piché, COPL, Univ. Laval (Canada)

Published in SPIE Proceedings Vol. 7386:
Photonics North 2009
Réal Vallée, Editor(s)

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