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Proceedings Paper

Studies on (Sr,Ba)TiO3 epitaxial grown thin films prepared by sol-gel processing
Author(s): Xing-hua Fu; Wen-hong Tao; Li-qiang Xin; Feng-jin Sun
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Paper Abstract

The applications of (Sr,Ba)TiO3 thin films in DRAM(Dynamic Random Access Memory), phase shifters and pyroelectric uncooled infrared detector have been one of the most important fields in the materials science. (Sr,Ba)TiO3 epitaxially grown thin films with good performance were prepared by the Sol-Gel process using barium acetate, strontium acetate and titanium-tetrabutoxide as the precursor materials. SrTiO3 substrate have the same perovskite structure and a similar lattice constant with the BST thin films, and have excellent chemical and thermal stability. The orientations of BST thin film grown on Nb:SrTiO3(100) and SrTiO3(100) substrates were (100) and (200) respectively. The dielectric constant and dielectric loss of the Sr.5Ba0.4Mg0.1TiO3 thin film prepared on Nb:SrTiO3 (100) were 100 and 0.0191 respectively at the frequency of 1M.

Paper Details

Date Published: 25 August 2009
PDF: 5 pages
Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73755K (25 August 2009); doi: 10.1117/12.839347
Show Author Affiliations
Xing-hua Fu, Jinan Univ. (China)
Wen-hong Tao, Jinan Univ. (China)
Li-qiang Xin, Jinan Univ. (China)
Feng-jin Sun, Jinan Univ. (China)


Published in SPIE Proceedings Vol. 7375:
ICEM 2008: International Conference on Experimental Mechanics 2008

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