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Proceedings Paper

Instantaneous surface profile measurement using polarized phase-shifting
Author(s): Terry Yuan-Fang Chen; Yi-Liang Du
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Paper Abstract

In this paper, an instantaneous phase-shifting interferometer (IPSI) is constructed, based on polarized light, to capture interference fringe images with different phase shifting instantaneously, and to avoid the effect of surrounding environments. The phase value is calculated according to the intensity of the interferometer images, and the surface profile of specimen can be determined after phase unwrapping. In experiments, the interference images are captured simultaneously by using four CCD cameras and the position mismatch of the four images are corrected by using digital image correlation (DIC). Tests of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.03μ~0.05μm can be achieved, and the maximum error is about 0.1μm.

Paper Details

Date Published: 25 August 2009
PDF: 7 pages
Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73754M (25 August 2009); doi: 10.1117/12.839312
Show Author Affiliations
Terry Yuan-Fang Chen, National Cheng Kung Univ. (Taiwan)
Yi-Liang Du, National Cheng Kung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7375:
ICEM 2008: International Conference on Experimental Mechanics 2008
Xiaoyuan He; Huimin Xie; YiLan Kang, Editor(s)

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