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Proceedings Paper

Coupling effect in microscale mechanical test
Author(s): Dongchuan Su; Xide Li; Lijuan Sun
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Paper Abstract

With the trend of miniaturization of the tested objects, the coupling effect in micro/nano mechanical test among the measurement system, the sample and the test environment becomes an important issue. In this paper, a single cantilever typed probe system is proposed and the coupling effect between the loading probe and the tested samples are investigated. The deformations of the loading probe and the cantilever typed samples, Si and silicon nitride cantilevers, are measured with the experiments and their deformation behaviors are discussed.

Paper Details

Date Published: 24 August 2009
PDF: 5 pages
Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 737535 (24 August 2009); doi: 10.1117/12.839244
Show Author Affiliations
Dongchuan Su, Tsinghua Univ. (China)
Xide Li, Tsinghua Univ. (China)
Lijuan Sun, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 7375:
ICEM 2008: International Conference on Experimental Mechanics 2008
Xiaoyuan He; Huimin Xie; YiLan Kang, Editor(s)

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