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Proceedings Paper

Micro/nano scale mechanical tests based on the probe platform
Author(s): Xide Li; Lijuan Sun; Dongchuan Sun; Dujuan Zeng; Bo Jiang
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Paper Abstract

Instrumentation for testing of mechanical properties on the micro and nano scales has developed enormously in recent years. This has enabled the mechanical behavior of surfaces, thin films, and micro/nano components to be studied with unprecedentedly small scale and high accuracy. In this paper, several testing systems and techniques for studying micromechanical properties are reviewed with particular emphasis on the probe based platform and its applications. Topics include the principles and performances of the integrated systems between the probe and the micromanipulator, the piezo-stage, the optical and high resolution scanning microscopes, the single and dual probe testing systems and the related method of micro force test. Researches on the capillary interaction between the probe tip and air-water surface, the motion of graphite microflakes, and accurate measurement of the mechanical parameter of nanowire are provided.

Paper Details

Date Published: 24 August 2009
PDF: 9 pages
Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73752Y (24 August 2009); doi: 10.1117/12.839235
Show Author Affiliations
Xide Li, Tsinghua Univ. (China)
Lijuan Sun, Tsinghua Univ. (China)
Dongchuan Sun, Tsinghua Univ. (China)
Dujuan Zeng, Tsinghua Univ. (China)
Bo Jiang, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 7375:
ICEM 2008: International Conference on Experimental Mechanics 2008
Xiaoyuan He; Huimin Xie; YiLan Kang, Editor(s)

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