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Proceedings Paper

Nondestructive evaluation of MEMS components by optical methods
Author(s): C. J. Tay; C. Quan; S. H. Wang
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Paper Abstract

In this work, a white light interferometry technique has been developed for non-destructive testing of micro-components. Essentially, the method utilizes a white light source which illuminates a test object using a modified Michelson interferometer configuration. The test object is mounted on a piezoelectric transducer (PZT) moving stage with a resolution of 1 nm. Images of the test objects are recorded using a CCD camera and stored in a PC for subsequent processing. Tests are conducted on an etched micro-beam which contains un-etched residual remains and optical multifibre ends. The results obtained show good agreement with those obtained from existing commercial profilometers and atomic force microscope.

Paper Details

Date Published: 25 August 2009
PDF: 6 pages
Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73752X (25 August 2009); doi: 10.1117/12.839234
Show Author Affiliations
C. J. Tay, National Univ. of Singapore (Singapore)
C. Quan, National Univ. of Singapore (Singapore)
S. H. Wang, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 7375:
ICEM 2008: International Conference on Experimental Mechanics 2008
Xiaoyuan He; Huimin Xie; YiLan Kang, Editor(s)

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