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Proceedings Paper

Influence of air viscous damping on beam-shaped micro-oscillator
Author(s): Xin Kang; Zhanwen Xi; Dingguo Zhang
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Paper Abstract

Micro beams are frequently used as executive components in MEMS such as pressure and acceleration sensors, micro switches, and micro resonators. In this paper, the influence of air viscous damping on the dynamic characteristics of a micro beam that oscillates in the air is evaluated analytically. A closed-form solution that can be used to predict the dynamic response of a micro beam is obtained based on a beam model used for evaluating the air viscous damping. The resonant frequencies versus the geometry parameters of a micro beam undergoing the air viscous damping are analyzed. The analysis results show that the influence of the air viscous damping on the resonant frequencies of a micro beam is notable and hence it should be take into account in the design process of MEMS. Moreover, as we know, there are various excitation methods for a micro beam in dynamics such as the electrostatic and PZT methods. The analytical results in our work also show that the influence of air viscosity on the dynamic characteristics of a micro beam will be diverse under different excitation methods.

Paper Details

Date Published: 24 August 2009
PDF: 7 pages
Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73750Y (24 August 2009); doi: 10.1117/12.839041
Show Author Affiliations
Xin Kang, Nanjing Univ. of Science and Technology (China)
Zhanwen Xi, Nanjing Univ. of Science and Technology (China)
Dingguo Zhang, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7375:
ICEM 2008: International Conference on Experimental Mechanics 2008
Xiaoyuan He; Huimin Xie; YiLan Kang, Editor(s)

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