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Proceedings Paper

Development of deformable mirror for spherical aberration compensation
Author(s): Sunao Aoki; Masahiro Yamada; Tamotsu Yamagami
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Paper Abstract

By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Our deformable mirror is driven by a single actuator different from a conventional deformable mirror of multi-actuator type. The deformed shape is controlled by giving strength distribution on the reverse side of the mirror. Furthermore, we have obtained a reflective film of low stress which had previously been a challenge.

Paper Details

Date Published: 31 July 2009
PDF: 6 pages
Proc. SPIE 7505, Optical Data Storage 2009, 750513 (31 July 2009); doi: 10.1117/12.838530
Show Author Affiliations
Sunao Aoki, Sony Corp. (Japan)
Masahiro Yamada, Sony Corp. (Japan)
Tamotsu Yamagami, Sony Corp. (Japan)

Published in SPIE Proceedings Vol. 7505:
Optical Data Storage 2009

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