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Proceedings Paper

Design and fabrication of a microfluidic chip driven by dielectric elastomers
Author(s): Bo Li; Hualing Chen; Jiuhui Wu; Zicai Zhu; Dongmei Xia; Sufang Jing
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Paper Abstract

This paper presents a valveless microfluidic chip driven by dielectric elastomers (DEs). First, the planar DE actuator is designed and the diaphragm actuating performances were characterized. Then the micro chip, containing a pump chamber and a pair of nozzle/diffuser, is fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 is sealed and finally covered by a PMMA. The pumping and flow rate is tested and measured under high AC supply, and a maxim flow rate of 21.2μl is achieved under 3500V, 8Hz sine wave.

Paper Details

Date Published: 20 October 2009
PDF: 9 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935S (20 October 2009); doi: 10.1117/12.838431
Show Author Affiliations
Bo Li, Xi'an Jiaotong Univ. (China)
Hualing Chen, Xi'an Jiaotong Univ. (China)
Jiuhui Wu, Xi'an Jiaotong Univ. (China)
Zicai Zhu, Xi'an Jiaotong Univ. (China)
Dongmei Xia, Xi'an Jiaotong Univ. (China)
Sufang Jing, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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