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Proceedings Paper

Effect of different support structures on the characteristic of the grating light modulators
Author(s): Wei Wei; Weiming Chen; Yong Zhu; Ning Wang; Yi Qin; Jie Zhang
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Paper Abstract

The energy method is applied in the analysis of the elastic coefficients of the crab-leg beam and the guided-end beam under the micro-nano-scale, the theoretical formula of the elastic coefficient is got. By considering the elastic coefficient caused by the residual stress and the edge effect of the capacitors, the static electrical and mechanical model of the grating light modulators is established. According to the static electrical and mechanical model and the actual design parameters, the pull-in voltage of the GLM with crab-leg beam is 7.2 V and the pull-in voltage of the GLM with guided-end beam is 9.5 V. The experimental system is built to test the performance of the grating light modulator. By using this experimental system, the pull-in voltage of the GLM with crab-leg beam is 7.6 V and the pull-in voltage of the GLM with guided-end beam is 10.2V.

Paper Details

Date Published: 20 November 2009
PDF: 9 pages
Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 75100I (20 November 2009); doi: 10.1117/12.838239
Show Author Affiliations
Wei Wei, Key Lab. of Opto-electronic Technology and Systems (China)
Chongqing Univ. (China)
Weiming Chen, Key Lab. of Opto-electronic Technology and Systems (China)
Chongqing Univ. (China)
Yong Zhu, Key Lab. of Opto-electronic Technology and Systems (China)
Chongqing Univ. (China)
Ning Wang, Key Lab. of Opto-electronic Technology and Systems (China)
Chongqing Univ. (China)
Yi Qin, Chongqing Univ. (China)
Jie Zhang, Key Lab. of Opto-electronic Technology and Systems (China)
Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 7510:
2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications

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