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Proceedings Paper

A new fiber optic sensor for inner surface roughness measurement
Author(s): Xiaomei Xu; Shoubin Liu; Hong Hu
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Paper Abstract

In order to measure inner surface roughness of small holes nondestructively, a new fiber optic sensor is researched and developed. Firstly, a new model for surface roughness measurement is proposed, which is based on intensity-modulated fiber optic sensors and scattering modeling of rough surfaces. Secondly, a fiber optical measurement system is designed and set up. Under the help of new techniques, the fiber optic sensor can be miniaturized. Furthermore, the use of micro prism makes the light turn 90 degree, so the inner side surface roughness of small holes can be measured. Thirdly, the fiber optic sensor is gauged by standard surface roughness specimens, and a series of measurement experiments have been done. The measurement results are compared with those obtained by TR220 Surface Roughness Instrument and Form Talysurf Laser 635, and validity of the developed fiber optic sensor is verified. Finally, precision and influence factors of the fiber optic sensor are analyzed.

Paper Details

Date Published: 23 November 2009
PDF: 9 pages
Proc. SPIE 7508, 2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 75080J (23 November 2009); doi: 10.1117/12.838205
Show Author Affiliations
Xiaomei Xu, Harbin Institute of Technology Shenzhen Graduate School (China)
Shoubin Liu, Harbin Institute of Technology Shenzhen Graduate School (China)
Hong Hu, Harbin Institute of Technology Shenzhen Graduate School (China)


Published in SPIE Proceedings Vol. 7508:
2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications

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