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Proceedings Paper

Research and design of resonant mass sensor based on tapered oscillating element
Author(s): Qing Ding; Jianguo Liu
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Paper Abstract

Resonant sensors have many advantages such as high sensitivity, long term stability and easy interfacing with digital signal processing. In this paper, we design and realize a resonant mass sensor. In order to get resonator of high Q value, tapered and thin oscillating tube is designed as the oscillator. Self-excited oscillation mode and closed-loop driving circuit is used, which enables the oscillating frequency stabilize in the natural frequency of the oscillator. Meanwhile, automatic gain control circuit is designed to keep constant amplitude of oscillating. Finally, this mass sensor achieve successful in measurement of concentration of aerosol. The experimental results show that the mass sensor takes advantages of compact structure, high precision and high reliability.

Paper Details

Date Published: 23 November 2009
PDF: 9 pages
Proc. SPIE 7508, 2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 75080C (23 November 2009); doi: 10.1117/12.837932
Show Author Affiliations
Qing Ding, Anhui Institute of Optics and Fine Mechanics (China)
Jianguo Liu, Anhui Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 7508:
2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications
YanBiao Liao; Anbo Wang; Tingyun Wang; Yukihiro Ishii, Editor(s)

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