Share Email Print
cover

Proceedings Paper

Microstructure testing with digital holography
Author(s): Qieni Lü; Baozhen Ge; Yiliang Chen; Jin Zou
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

An optical system of digital holography based on 4f system for microstructure measurement is studied. Fresnel off-axis hologram generated by a magnified image of microstructure is recorded with a CCD, and the magnified reconstructed image can be obtained by the angular spectrum method. The quantitative phase information of the microstructure under test is obtained. A theoretical analysis is performed in detail and the experiment done, and the experimental results are also given. The research shows that the method presented in this paper can be applied to micro-object imaging and its quantitative measurement.

Paper Details

Date Published: 20 November 2009
PDF: 6 pages
Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751105 (20 November 2009); doi: 10.1117/12.837812
Show Author Affiliations
Qieni Lü, Tianjin Univ. (China)
Baozhen Ge, Tianjin Univ. (China)
Yiliang Chen, Tianjin Univ. (China)
Jin Zou, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 7511:
2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Shenghua Ye; Guangjun Zhang; Jun Ni, Editor(s)

© SPIE. Terms of Use
Back to Top