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Proceedings Paper

Design and simulation of tunable micromirror for two-color microbolometer
Author(s): Yuguang Gong; Wei Li; Haihong Cai; Zhi Li; Chao Chen; Yadong Jiang
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Paper Abstract

A tunable reflecting micromirror made up of two layers of Al and Si3N4 is designed to suspend between the silicon substrate and the heat sensitive membrane for measuring the actual temperature and color of an object based on comparison of two wavelength response windows, 3-5 μm and 8-12 μm. The micromirror, switching between two positions by an applied electrostatic voltage, provides a response to two wavelength windows by tuning the optical tunable resonant cavity. With different distances between the micromirror and the bottom electrode, the total capacitance of the tunable micromirror is gained based on electromagnetic analysis and theoretical equation. The pull-in voltage is calculated as 8.21 V by electrostatic-mechanical coupling analysis. But if the voltage is increased to about 9.73 V, the micromirror will touch the bottom electrode by pull-in behavior. At last, the vibration modes of the tunable micromirror are simulated using ANSYS, and the fabrication process flow of the two-color microbolometer is theoretically demonstrated.

Paper Details

Date Published: 20 November 2009
PDF: 9 pages
Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 75100E (20 November 2009); doi: 10.1117/12.837798
Show Author Affiliations
Yuguang Gong, Univ. of Electronic Science and Technology of China (China)
Wei Li, Univ. of Electronic Science and Technology of China (China)
Haihong Cai, Univ. of Electronic Science and Technology of China (China)
Zhi Li, Univ. of Electronic Science and Technology of China (China)
Chao Chen, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7510:
2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
Zhaoying Zhou; Toshio Fukuda; Helmut Seidel; Xinxin Li; Haixia Zhang; Tianhong Cui, Editor(s)

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