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Proceedings Paper

Optimization of pupil sampling scheme for aerial-image-based aberration measurement of projection optics in lithographic tools
Author(s): Lijuan Wang; Shiyuan Liu; Wei Liu; Tingting Zhou
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Paper Abstract

In this paper, the aberration measurement technique using aerial image sensor (AIS) is further discussed, and an approach to optimize the pupil sampling scheme for this technique is proposed. The accuracy of this technique heavily relies on the pupil sampling scheme as it has a significant impact on the random error propagation of the Zernike coefficients. We formulate the optimization problem using a continuous function and using the gradient information to search the solution space. We also employ the regularization framework using penalty functions to restrain the complexity of the sampling scheme. The simulation work has demonstrated that the pupil sampling scheme obtained by the proposed optimization approach are more suitable than those by the trial and error method.

Paper Details

Date Published: 20 November 2009
PDF: 10 pages
Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751106 (20 November 2009); doi: 10.1117/12.837771
Show Author Affiliations
Lijuan Wang, Huazhong Univ. of Science and Technology (China)
Shiyuan Liu, Huazhong Univ. of Science and Technology (China)
Wei Liu, Huazhong Univ. of Science and Technology (China)
Tingting Zhou, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7511:
2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Shenghua Ye; Guangjun Zhang; Jun Ni, Editor(s)

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