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Proceedings Paper

Vibration errors in phase-shifting interferometer
Author(s): Hao-ming Wei; Ting-wen Xing
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Paper Abstract

Unexpected mechanical vibrations can significantly degrade the otherwise high accuracy of phase-shifting interferometer (PSI). Because the data acquisition takes place over time, sensitivity to vibration is as a function of the frequency, the phase, the amplitude of vibrations, the smoothness of test surface and the slope coefficient of reference plane. A complete, nonlinear, continuing mathematical model of PSI with well defined longitudinal and transverse vibrations is presented. The approach to quantifying vibration is using the discrete sum formula instead of the continuing integral model. Computer simulations are performed over a range of vibration frequencies and amplitudes for 4,7,11 and 15 frames phase-shift algorithms. Numerical simulation results demonstrate the methods to increase the accuracy of PSI is to choose more phase steps and higher speed CCD camera and PSI with small slope coefficient of reference surface and good smooth test surface has low sensitivity to transverse vibration. Finally programs basing on the phase-shifting interference theory are given to imitate the process of obtaining interferogram with vibrations. After intensity signal is processed through PSI algorithm and phase unwrapping algorithm, the sensitivity of PSI to vibration is achieved and described by the difference of the computer phase and test phase. The results of numerical simulation are supported by several examples on dummy experimental platform.

Paper Details

Date Published: 20 November 2009
PDF: 9 pages
Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 75110H (20 November 2009); doi: 10.1117/12.837606
Show Author Affiliations
Hao-ming Wei, Institute of Optics and Electronics (China)
Graduate School of the CAS (China)
Ting-wen Xing, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 7511:
2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Shenghua Ye; Guangjun Zhang; Jun Ni, Editor(s)

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