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Proceedings Paper

Design and simulation of comparative method for testing transverse thermal conductivity of SixNy thin film
Author(s): Lixia Yang; Zhiming Wu; Kai Yuan; Yadong Jiang
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Paper Abstract

A new structure of SixNy thin film transverse thermal conductivity measuring by comparative method is introduced. And by using finite element software ANSYS we emulated the effect to thermal distribution by the factors of heatpower, length & width of suspending beam, and the thermal conductivity. This method, with no limitation of measuring in vacuum, is simply structured and easily operated.

Paper Details

Date Published: 20 November 2009
PDF: 9 pages
Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751114 (20 November 2009); doi: 10.1117/12.837586
Show Author Affiliations
Lixia Yang, Univ. of Electronic Science and Technology of China (China)
Zhiming Wu, Univ. of Electronic Science and Technology of China (China)
Kai Yuan, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7511:
2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Shenghua Ye; Guangjun Zhang; Jun Ni, Editor(s)

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