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Proceedings Paper

Mechanical characterization of zinc oxide thin films on glass substrates by nanoindentation
Author(s): Yichong Cheng; Zhan-Sheng Guo
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Paper Abstract

Microstructures and mechanical properties of zinc oxide (ZnO) thin films deposited onto glass substrates by rf magnetron sputtering were studied. Surface morphologies and crystalline structural characteristics were examined using atomic force microscopy (AFM) and X-ray diffraction (XRD), respectively. Mechanical properties were measured by nanoindentation. The crystalline structures of ZnO thin films were well ordered with high c-axis (002) orientations. The surface morphologies of ZnO thin films were smooth and grains grew and distributed uniformly. A single pop-in in the load-displacement curve was clearly observed at a specific depth (7-10nm) of the thin film. The hardness and Young's modulus of ZnO thin films were ranged from 8.2 to 10.4GPa and 105 to 120GPa, respectively.

Paper Details

Date Published: 20 October 2009
PDF: 6 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 749309 (20 October 2009); doi: 10.1117/12.837438
Show Author Affiliations
Yichong Cheng, Shanghai Univ. (China)
Zhan-Sheng Guo, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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