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Proceedings Paper

Impact of lamp instability on rotating compensator based ellipsometry
Author(s): Chunguang Hu; Lidong Sun
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Paper Abstract

The influence of statistical noise such as lamp instability, photon shot noise, and detection noise on the signal quality in rotating compensator based ellipsometry (RCE) is investigated by means of mathematical modeling and simulations. The results uncover the transfer route from noise to measurement error under different experimental conditions, and thus provide a basis for noise diagnosis and control in RCE systems.

Paper Details

Date Published: 26 November 2009
PDF: 10 pages
Proc. SPIE 7506, 2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 750617 (26 November 2009); doi: 10.1117/12.837430
Show Author Affiliations
Chunguang Hu, Tianjin Univ. (China)
Johannes Kepler Univ. Linz (Austria)
Lidong Sun, Johannes Kepler Univ. Linz (Austria)


Published in SPIE Proceedings Vol. 7506:
2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Yongtian Wang; Yunlong Sheng; Kimio Tatsuno, Editor(s)

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