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Proceedings Paper

Tolerancing and analysis of a diffractive beam shaper
Author(s): Adam Fedor; Marc Himel
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Paper Abstract

This paper describes the design and analysis of a deep-UV diffractive beam shaper for converting a collimated Gaussian beam into a collimated flattop beam. Diffractive beam shapers can be manufactured in most common materials to provide good beam control with very low non-uniformity. Beam shapers, however, are generally very sensitive to beam parameters and alignment. Here we examine the sensitivity of the beam shaper to alignment and tilt of the input beam, phase surfaces, and various other fabrication errors. This device was successfully built and comparisons with laboratory measurements show excellent agreement with simulation predictions.

Paper Details

Date Published: 16 February 2010
PDF: 8 pages
Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910W (16 February 2010); doi: 10.1117/12.837165
Show Author Affiliations
Adam Fedor, Tessera, Inc. (United States)
Marc Himel, Tessera, Inc. (United States)


Published in SPIE Proceedings Vol. 7591:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
Winston V. Schoenfeld; Jian Jim Wang; Marko Loncar; Thomas J. Suleski, Editor(s)

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