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Proceedings Paper

Optical testing of large rough aspheric surface using far-infrared interferometer
Author(s): Yongqian Wu; Yudong Zhang; Fan Wu
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Paper Abstract

An far-infrared interferometer which can test rough surface is presented. It is based on the optical configuration of classical Fizeau interferometer. In addition, the design and system performance of an infrared system is presented. Using the infrared system, the far-infrared interferometer is capable of testing rough aspheric surfaces. The measuring error(RMS) is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.

Paper Details

Date Published: 5 August 2009
PDF: 6 pages
Proc. SPIE 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications, 73832Y (5 August 2009); doi: 10.1117/12.837125
Show Author Affiliations
Yongqian Wu, Institute of Optics and Electronics (China)
Yudong Zhang, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 7383:
International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications
Jeffery Puschell; Hai-mei Gong; Yi Cai; Jin Lu; Jin-dong Fei, Editor(s)

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