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Proceedings Paper

Study of CO2 laser smoothing of surface roughness in fused silica
Author(s): Nan Shen; Manyalibo J. Matthews; James E. Fair; Jerald A. Britten; Hoang T. Nguyen; Juliet D. Cooke; Selim Elhadj; William D. Henshaw; Gabe M. Guss; Isaac L. Bass; Steven T. Yang
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Paper Abstract

Small micrometer-sized roughness on optical surfaces, caused by laser damage and/or redeposition of laser ablated material, can cause local electric field intensification which may lead to damage initiation both on the optics and/or downstream. We examined the smoothing of etched periodic surface structures on SiO2 substrate with 10.6μm CO2 laser using atomic force microscopy. The characteristic surface tension driven mass flow of the glass under different laser parameters were simulated using computational fluid dynamics and correlated with experimental results. We found that during CO2 laser polishing the estimate viscosity of the silica glass appears to be higher than typical literature values measured at a temperature similar to the laser heating conditions. This discrepancy can be explained by the observation that at high temperature, a significant portion of the hydroxyl content in the layer of heated silica glass can diffuse out resulting in a much stiffer glass.

Paper Details

Date Published: 31 December 2009
PDF: 7 pages
Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 750411 (31 December 2009); doi: 10.1117/12.836907
Show Author Affiliations
Nan Shen, Lawrence Livermore National Lab. (United States)
Manyalibo J. Matthews, Lawrence Livermore National Lab. (United States)
James E. Fair, Lawrence Livermore National Lab. (United States)
Jerald A. Britten, Lawrence Livermore National Lab. (United States)
Hoang T. Nguyen, Lawrence Livermore National Lab. (United States)
Juliet D. Cooke, Lawrence Livermore National Lab. (United States)
Selim Elhadj, Lawrence Livermore National Lab. (United States)
William D. Henshaw, Lawrence Livermore National Lab. (United States)
Gabe M. Guss, Lawrence Livermore National Lab. (United States)
Isaac L. Bass, Lawrence Livermore National Lab. (United States)
Steven T. Yang, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 7504:
Laser-Induced Damage in Optical Materials: 2009
Gregory J. Exarhos; Vitaly E. Gruzdev; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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