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Proceedings Paper

Studies on the fabrication method for the array of polycrystalline mercuric iodide detectors
Author(s): Wei-feng Zheng; Wei-min Shi; Dong-mei Li; Juan Qin; Lin-jun Wang; Jian Huang; Jun-yang Yu; Yi-ben Xia
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Paper Abstract

The Mercuric Iodide (HgI2) semiconductor array detectors possess the characters of low noise, high detection efficiency, high energy resolution and working in room temperature. In this work, modified hot-wall physical vapor deposition (HW-PVD) method was used to grow high-quality polycrystalline HgI2 thin-films on ITO glasses, and then 4×4 and 8×8 HgI2 array detectors for X-ray radiation were fabricated. We used two fabrication processes for polycrystalline HgI2 array detectors. One was using mask made of stainless steel with good flexibility; while the other was to photo lithography the array on the ITO glass. The main purpose for this work was to compare the electrical properties of polycrystalline HgI2 array detectors fabricated from different processes, and to find out the optimal process for HgI2 detectors. Results indicated that the photo lithography method was a better way to fabricate polycrystalline mercuric iodide array detector than using mask method.

Paper Details

Date Published: 4 August 2009
PDF: 8 pages
Proc. SPIE 7385, International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications, 73851T (4 August 2009); doi: 10.1117/12.836611
Show Author Affiliations
Wei-feng Zheng, Shanghai Univ. (China)
Wei-min Shi, Shanghai Univ. (China)
Dong-mei Li, Shanghai Univ. (China)
Juan Qin, Shanghai Univ. (China)
Lin-jun Wang, Shanghai Univ. (China)
Jian Huang, Shanghai Univ. (China)
Jun-yang Yu, Shanghai Univ. (China)
Yi-ben Xia, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 7385:
International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications
X.-C. Zhang; James M. Ryan; Cun-lin Zhang; Chuan-xiang Tang, Editor(s)

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