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Proceedings Paper

Diagnostics tools for subsurface damage characterization of ground silica parts
Author(s): P. Cormont; J. Neauport; N. Darbois; J. Destribats; C. Ambard; O. Rondeau
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Paper Abstract

Subsurface cracks in fused silica optics are known to be damage initiators under laser irradiation. Each step of optic production, from sawing to polishing, creates its own type of cracks. An efficient optic manufacturing process requires that each production step removes cracks from the previous step. The extent of cracks has to be measured for each production step. We review and compare different subsurface damage (SSD) characterization techniques applied to ground and fine ground fused silica samples.

Paper Details

Date Published: 31 December 2009
PDF: 6 pages
Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 75040Y (31 December 2009); doi: 10.1117/12.836368
Show Author Affiliations
P. Cormont, CEA CESTA (France)
J. Neauport, CEA CESTA (France)
N. Darbois, CEA CESTA (France)
J. Destribats, CEA CESTA (France)
C. Ambard, CEA LE RIPAULT (France)
O. Rondeau, CEA LE RIPAULT (France)


Published in SPIE Proceedings Vol. 7504:
Laser-Induced Damage in Optical Materials: 2009
Gregory J. Exarhos; Vitaly E. Gruzdev; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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