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Proceedings Paper

Development of large size MgF2 single crystal grown by the CZ method
Author(s): Masao Ariyuki; Yasuhiro Hashimoto; Naoto Mochizuki; Yoji Inui; Isao Masada; Teruhiko Nawata; Tsuguo Fukuda
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Paper Abstract

In the semiconductor lithography technology, the polarized illumination system is applied to make the resolution more microscopic, therefore the polarizer material with excellent durability against the high power ArF laser has been required. Magnesium fluoride (MgF2) is one of a suitable material because of its laser durability and high transparency in VUV region. Previously we reported MgF2 single crystal with diameter of 100mm by using the Czochralski (CZ) method. By optimizing the crystal growth conditions, MgF2 single crystals with over 150mm in diameter have been stably grown. Also these crystals show good optical properties and crystallinity.

Paper Details

Date Published: 31 December 2009
PDF: 8 pages
Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 75041Q (31 December 2009); doi: 10.1117/12.836349
Show Author Affiliations
Masao Ariyuki, Tokuyama Corp. (Japan)
Yasuhiro Hashimoto, Tokuyama Corp. (Japan)
Naoto Mochizuki, Tokuyama Corp. (Japan)
Yoji Inui, Tokuyama Corp. (Japan)
Isao Masada, Tokuyama Corp. (Japan)
Teruhiko Nawata, Tokuyama Corp. (Japan)
Tsuguo Fukuda, Fukuda X'tal Lab. (Japan)

Published in SPIE Proceedings Vol. 7504:
Laser-Induced Damage in Optical Materials: 2009
Gregory J. Exarhos; Vitaly E. Gruzdev; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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