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Proceedings Paper

One-shot surface profile measurement using polarized phase-shifting
Author(s): Yuan-Fang Chen; Yi-liang Du
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Paper Abstract

An instantaneous polarized phase-shifting interferometer (IPSI) with an optical image combiner is designed to form a one-shot surface profile measurement system. The interference images are captured simultaneously by using one CCD camera. Digital image correlation (DIC) method is applied effectively to correct the position mismatch among the images. Test of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.07μm~0.09μm can be achieved, and the maximum error is about 0.2μm.

Paper Details

Date Published: 20 November 2009
PDF: 8 pages
Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751102 (20 November 2009); doi: 10.1117/12.836308
Show Author Affiliations
Yuan-Fang Chen, National Cheng Kung Univ. (Taiwan)
Yi-liang Du, National Cheng Kung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 7511:
2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Shenghua Ye; Guangjun Zhang; Jun Ni, Editor(s)

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