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Proceedings Paper

Methods and apparatus for laser beam scanners with different actuating mechanisms
Author(s): Si-hai Chen; Si-hua Xiang; Xin Wu; Shan Dong; Ding Xiao; Xia-wei Zheng
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Paper Abstract

In this paper, 3 types of laser beam scanner are introduced. One is transmissive beam scanner, which is composed of convex and concave microlens arrays (MLAs). By moving the concave lens in the plane vertical to the optical axis, the incident beam can be deflected in two dimensions. Those two kinds of MLAs are fabricated by thermal reflow and replication process. A set of mechanical scanner frame is fabricated with the two MLAs assembling in it. The testing result shown that the beam deflection angles are 9.5° and 9.6°, in the 2 dimension(2D) with the scanning frequency of 2 HZ and 8 HZ, respectively. The second type of laser beam scanner is actuated by voice coil actuators (VCAs). Based on ANSOFT MAXWELL software, we have designed VCAs with small size and large force which have optimized properties. The model of VCAs is built using AutoCAD and is analyzed by Ansoft maxwell. According to the simulation results, high performance VCAs are fabricated and tested. The result is that the force of the VCAs is 6.39N/A, and the displacement is ±2.5mm. A set up of beam scanner is fabricated and actuated by the designed VCAs. The testing result shown that the two dimensional scanning angle is 15° and 10° respectively at the frequency of 60HZ. The two dimensional scanning angle is 8.3° and 6° respectively at the frequency of 100HZ. The third type of scanner is actuated by amplified piezoelectric actuators (APAs). The scanning mirror is actuated by the piezoelectric (PZ) actuators with the scanning frequency of 700HZ, 250HZ and 87HZ respectively. The optical scanning angle is ±0.5° at the three frequencies.

Paper Details

Date Published: 29 August 2009
PDF: 12 pages
Proc. SPIE 7382, International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging, 73825G (29 August 2009); doi: 10.1117/12.836190
Show Author Affiliations
Si-hai Chen, Huazhong Univ. of Science and Technology (China)
Si-hua Xiang, Huazhong Univ. of Science and Technology (China)
Xin Wu, Huazhong Univ. of Science and Technology (China)
Shan Dong, Huazhong Univ. of Science and Technology (China)
Ding Xiao, Huazhong Univ. of Science and Technology (China)
Xia-wei Zheng, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7382:
International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging
Farzin Amzajerdian; Chun-qing Gao; Tian-yu Xie, Editor(s)

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