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Proceedings Paper

The case for electro-optic waveguide devices from ferroelectric (Pb,La)(Zr,Ti)O[sub]3[/sub] thin film epilayers
Author(s): Ørnulf Nordseth; Jon Øyvind Kjellman; Change Chuan You; Arne Røyset; Thomas Tybell; Jostein K. Grepstad
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Paper Abstract

(Pb,La)(Zr,Ti)O3 (PLZT) thin films were grown epitaxially on MgO(001) substrate by radio frequency magnetron sputtering. Different ridge-type waveguides, including a Mach-Zehnder interferometer with co-planar metal electrodes, were defined in the PLZT epilayer using standard photolithographic techniques. The propagation losses for transverse electric polarized infrared light (λ0 = 1550 nm) in these ridge-type channel waveguides were measured at ~10 dB/cm. Electro-optic modulation was demonstrated with a half-wave voltage Vπ ≈ 150 V for a 3 mm interaction length, corresponding to a Pockels coefficient r51 ≈ 8.3 pm/V. Photonic crystal slabs (PCSs) were defined by etching a hexagonal two-dimensional lattice of holes in prepatterned ridge-type waveguides, using a focused ion beam. The sidewalls of the etched holes were inclined by an angle of ~10°. The impact on the transmission properties of these PCSs caused by out-of-plane structural asymmetries, such as deviation from a cylindrical shape of the FIB-etched air holes and the presence of a substrate with refractive index different from that of air, was investigated by numerical simulation. Auger depth profiling was used to investigate Ga+ ion implantation into the PLZT epilayer during FIB processing. The measurements suggest that such implantation of Ga+ is confined to the uppermost ~50 nm of the sample surface.

Paper Details

Date Published: 24 August 2009
PDF: 13 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73810F (24 August 2009); doi: 10.1117/12.835789
Show Author Affiliations
Ørnulf Nordseth, Norwegian Univ. of Science and Technology (Norway)
Jon Øyvind Kjellman, Norwegian Univ. of Science and Technology (Norway)
Change Chuan You, Norwegian Univ. of Science and Technology (Norway)
Arne Røyset, SINTEF Materials and Chemistry (Norway)
Thomas Tybell, Norwegian Univ. of Science and Technology (Norway)
Jostein K. Grepstad, Norwegian Univ. of Science and Technology (Norway)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

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