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Proceedings Paper

Novel 0.9 THz integrated horn antenna based on MEMS technology
Author(s): Yong Yuan; Yong Liu; Xin Lv
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Paper Abstract

Planar integrated antenna has special advantages in Terahertz application, but with disadvantage of low gain. In this paper, a novel Terahertz integrated horn antenna operating at 0.9 THz was proposed in order to enhance the radiation performance of planar integrated antenna elements. The processing of this type horn antenna combine two kind MEMS techniques, silicon dry etching and silicon wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. FEM (Finite Element Method) is used to analyze the performances of antenna. The main superiority of this kind integrated horn antenna is that it has more tunable parameters than other type MEMSbased integrated antennas. High performance Terahertz antenna elements can be obtained by synthesizing the parameters of the horn.

Paper Details

Date Published: 5 August 2009
PDF: 6 pages
Proc. SPIE 7385, International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications, 738529 (5 August 2009); doi: 10.1117/12.835732
Show Author Affiliations
Yong Yuan, Beijing Institute of Technology (China)
Yong Liu, Beijing Institute of Technology (China)
Xin Lv, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 7385:
International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications

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