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Proceedings Paper

Research on packaging technology for a fiber optic acoustic sensor
Author(s): Rui Li; Wen Xiao; Dong Yao; Bingshi Xu; Lin Cong
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Paper Abstract

A micro acoustic sensor with inclined fibers was proposed to improve its sensitivity. In order to get the highest sensitivity within the micro structure, the relative positions of elements in sensor should be exactly located; especially the distance between fibers and membrane should be optimum. A packaging technology for this micro sensor assemblage and test is introduced. It is based on a packaging system composed of three parts: distance adjusting, intensity collection and data analysis. The distance adjusting part increases the operating distance with a step of 2μm. Meanwhile the received power is recorded by intensity collection part on line to get the intensity characteristic curve. Through the data analysis part, sensitivity curve, optimum operating distance, the highest sensitivity and optimum received power of the proposed acoustic sensor are got. An experiment was implemented to assemble and test a sensor whose angle between two fibers was 60° by the proposed packaging system. Its optimum operating distance and highest sensitivity were analyzed to be 30μm and 2.49μW/μm. The sensitivity of packaged sensor to standard acoustic signal is 16mV/Pa and SNR is tested to be 54dB.

Paper Details

Date Published: 24 August 2009
PDF: 6 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73810U (24 August 2009); doi: 10.1117/12.835680
Show Author Affiliations
Rui Li, Beihang Univ. (China)
Wen Xiao, Beihang Univ. (China)
Dong Yao, Beihang Univ. (China)
Bingshi Xu, Beihang Univ. (China)
Lin Cong, Beihang Univ. (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

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