Share Email Print
cover

Proceedings Paper

Modeling and analysis for moving plate with two-dimensional effect
Author(s): Tian-yi Liu; Wei-hua Li; Qing-an Huang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A conventional one-dimensional model for an electrostatically actuated beam only considers elastic force and electrostatic force. This paper puts forward a novel method in order to describe the variable cross-section beam. Three improvements are taken into account. First, the supported force for the cross-section is pondered. Second, the displacement of each points of the beam deviates from the ideal function. Third, the displacement differs both in x-axis and y-axis. In addition, there is a mathematic redundancy about integral when the electrostatic force is calculated. Therefore, a mathematical approximation is proposed, by which the mathematical computation can be remarkably simplified while the accuracy is ensured. To validate the novel mode, the displacement of mid-point and the resonant frequency of the beam were calculated as far as these three modifications were concerned. The simulations by a Finite Element Method (FEM) CoventWare have been compared with the novel model. It is shown that the two-dimensional (2-D) model for the variable cross-section beam would be useful.

Paper Details

Date Published: 24 August 2009
PDF: 7 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73812R (24 August 2009); doi: 10.1117/12.835568
Show Author Affiliations
Tian-yi Liu, Southeast Univ. (China)
Wei-hua Li, Southeast Univ. (China)
Qing-an Huang, Southeast Univ. (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

© SPIE. Terms of Use
Back to Top