Share Email Print
cover

Proceedings Paper

Optical system of nano-level vibration measurement by laser Doppler
Author(s): Li-yan Li; Hua-lin Zeng; Yan Zhou
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Through the studying on the M-Z interferometer optical system, the authors give a strict contrast analysis of influence on the steadiness of optical system about optical power, polarization state of laser and optical feedback caused by different types of beam splitters was made. After adjusting and optimizing the optical system, the authors built a high a precision vibration measurement of optical system. The system is advantage at the nano-level vibration measurement, low energy loss and far measuring distance.

Paper Details

Date Published: 29 August 2009
PDF: 7 pages
Proc. SPIE 7382, International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging, 738253 (29 August 2009); doi: 10.1117/12.835549
Show Author Affiliations
Li-yan Li, Institute of Semiconductors (China)
Changchun Univ. of Science and Technology (China)
Hua-lin Zeng, Institute of Semiconductors (China)
Yan Zhou, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 7382:
International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging
Farzin Amzajerdian; Chun-qing Gao; Tian-yu Xie, Editor(s)

© SPIE. Terms of Use
Back to Top