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Proceedings Paper

MEMS compressed tunable grating
Author(s): Xiang Liu; Tie Li; Anjie Ming; Yanxiang Liu; Ping Zhou; Yuelin Wang
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Paper Abstract

Currently, MEMS tunable grating draws a lot of attentions due to its promising applications in display, spectrometer, external cavity laser, programmable mask, optical telecommunication, etc. Among phase-tunable and incident-angletunable grating, period-tunable grating distinguishes itself by relative simple structure, ease-to-fabrication, good performance, and ability to be integrated with IC. In this paper, a novel approach based on compressed period grating is demonstrated. Based on a developed comb-drive actuator working in a low voltage of 37V, our grating period was compressed for 12.5%. The first resonant mode of the comb-drive actuator was simulated to be 3.8 kHz by finite element modeling.

Paper Details

Date Published: 24 August 2009
PDF: 6 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73812L (24 August 2009); doi: 10.1117/12.835517
Show Author Affiliations
Xiang Liu, Shanghai Institute of Microsystem and Information Technology (China)
Graduate School of the Chinese Academy of Sciences (China)
Tie Li, Shanghai Institute of Microsystem and Information Technology (China)
Anjie Ming, Shanghai Institute of Microsystem and Information Technology (China)
Yanxiang Liu, Shanghai Institute of Microsystem and Information Technology (China)
Ping Zhou, Shanghai Institute of Microsystem and Information Technology (China)
Yuelin Wang, Shanghai Institute of Microsystem and Information Technology (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

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