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Proceedings Paper

MOEMS accelerometer based on microfiber knot resonator
Author(s): Yu Wu; Xu Zeng; Yun-Jiang Rao; Chang-Lun Hou; Guo-Guang Yang
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Paper Abstract

A MOEMS (Micro-Optical Electronic Mechanical System) accelerometer based on a microfiber knot resonator is proposed and demonstrated in this paper, and the microfiber knot resonator acts as the sensing device for vibration measurement of the MOEMS structure. The diameters of the microfiber and microfiber knot are 1.1um and 386um, respectively. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range over ±25g. This sensitivity can be increased significantly by increasing the Q factor of the microfiber knot resonators, which can be achieved by improving fabrication of the microfiber.

Paper Details

Date Published: 5 October 2009
PDF: 4 pages
Proc. SPIE 7503, 20th International Conference on Optical Fibre Sensors, 75036U (5 October 2009); doi: 10.1117/12.835344
Show Author Affiliations
Yu Wu, Univ. of Electronic Science and Technology of China (China)
Zhejiang Univ. (China)
Xu Zeng, Zhejiang Univ. (China)
Yun-Jiang Rao, Univ. of Electronic Science and Technology of China (China)
Chang-Lun Hou, Zhejiang Univ. (China)
Guo-Guang Yang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 7503:
20th International Conference on Optical Fibre Sensors
Julian D. C. Jones, Editor(s)

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