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Proceedings Paper

A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching
Author(s): Yixian Ge; Ming Wang; Chundi Yang
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Paper Abstract

This paper presents a miniature fiber optic pressure sensor based on Fabry-Perot interference fabricated on the tip of a single mode (SM) fiber. The sensor measures only 125μm in diameter. A Fabry-Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The overall chemical reaction of the fiber wet etching is specifically represented. Pressure testing system is carried out. By tracing a peak point in the interference spectrum, the gap length of the sensor can be demodulated. The sensor is made entirely of fused silica, whose structure has good stability, cabinet, simple for fabrication and low cost. It may also find uses in medical applications.

Paper Details

Date Published: 5 October 2009
PDF: 4 pages
Proc. SPIE 7503, 20th International Conference on Optical Fibre Sensors, 750341 (5 October 2009); doi: 10.1117/12.834941
Show Author Affiliations
Yixian Ge, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Chundi Yang, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 7503:
20th International Conference on Optical Fibre Sensors
Julian D. C. Jones, Editor(s)

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