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Proceedings Paper

Optimal design and fabrication of ring resonator composed of Ge02-doped silica waveguides for IOG
Author(s): Lijun Guo; Bangren Shi; Chen Chen; Hao Lv; Zhenming Zhao; Meng Zhao
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Paper Abstract

The ring resonator is the core sensing element in the resonant integration optical gyroscope (IOG) . Its performances influence the minimum resolution and the error items of gyroscope directly and it is the key of the design and manufacturing. This paper presents optimal design of ring resonator composed of Ge02 -doped silica waveguides fabricated on silicon substrates using wide angle beam propagation method (WA-BPM). The characteristic of the light propagating across the ring resonator is analyzed. According to the design results, we succeed in fabricating the ring resonator by Plasma Enhanced Chemical Vapor Deposition (PECVD) method and Reactive Ion Etching (RIE) technology. In order to characterize the ring resonator, an optical measurement setup is built, fiber laser line-width is 50 kHz, detector responsibility is 0.95A/W and integral time is 10s. By testing, propagation loss and total loss of ring resonator are 0.02dB/cm and 0.1dB/circuit respectively. Observed from the resonance curve, a finesse of 12.5.

Paper Details

Date Published: 24 August 2009
PDF: 6 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73810Q (24 August 2009); doi: 10.1117/12.834916
Show Author Affiliations
Lijun Guo, Changchun Univ. of Science and Technology (China)
Bangren Shi, Changchun Univ. of Science and Technology (China)
Chen Chen, Changchun Univ. of Science and Technology (China)
Hao Lv, Changchun Univ. of Science and Technology (China)
Zhenming Zhao, Changchun Univ. of Science and Technology (China)
Meng Zhao, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

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