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Proceedings Paper

Thermo-optic SOI waveguide switch matrix
Author(s): Yuan-yuan Chen; Yan-ping Li; Jin-Zhong Yu
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Paper Abstract

Optical switches are important devices in optical communications. A blocking 8×8 thermo-optic waveguide switch matrix and a rearrangeable nonblocking one are designed and fabricated on silicon-on-insulator (SOI) wafer. The building block of the matrix is a 2×2 switch cell with a Mach-Zehnder interferometer(MZI) configuration, where a general multi-mode interferometer (MMI) serves as splitter/combiners. Nonblocking switch matrix presents excess loss of 10.9dB~13.6dB and crosstalk of -26.6dB~-13.5dB. Blocking one presents excess loss of 6.6dB~9.6dB and crosstalk of -25.8dB~-16.8dB. Their extinction ratios vary from 17dB to 25dB. The power consumption of each switch cell is less than 240mW.The response time is less than 3μs. The power consumption and the response times are much better than that of silica-based or polymer-based switch matrix because of the large thermo-optic coefficient and the high thermal conductivity of silicon.

Paper Details

Date Published: 24 August 2009
PDF: 7 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73811T (24 August 2009); doi: 10.1117/12.834814
Show Author Affiliations
Yuan-yuan Chen, Beijing Technology and Business Univ. (China)
Institute of Semiconductors (China)
Yan-ping Li, Peking Univ. (China)
Institute of Semiconductors (China)
Jin-Zhong Yu, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors

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