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Proceedings Paper

MEMS resonator with digitally tunable resonant frequency
Author(s): Qingquan Liu
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Paper Abstract

This paper proposes, for the first time, a MEMS-based digitally tunable micromechanical resonator (DTMR). A general methodology of tuning the resonant frequency of a MEMS comb-driven resonator using digital voltages is presented. In this mechanism, a microelectromechanical digital-to-analog converter (MEMDAC) is employed as the tuning unit. The resonant frequency of the DTMR shifts in response to the input digital voltage. Several structures have been proposed, while the one using the number of the vertical beams as the scale factor features the optimum linearity. In a modified design, the resonate frequency can be tuned from approximately 65 to 94 kHz. The maximum deviation from ideal linearity can be reduced to 0.31 kHz, which is remarkably less than those of the preliminary designs.

Paper Details

Date Published: 24 August 2009
PDF: 7 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73811W (24 August 2009); doi: 10.1117/12.834703
Show Author Affiliations
Qingquan Liu, Nanjing Univ. of Information Science and Technology (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

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