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Proceedings Paper

Study on fabrication of silicon microcantilevers for the pulse sensor by a laser etching technology
Author(s): Lu Wang; Dian-zhong Wen
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Paper Abstract

To solve some problems of silicon micro-cantilevers etching rate and quality, a new method which combines laser micromachining processes and micro-electromechanical systems (MEMS) is adopted to fabricate silicon microcantilevers. The experimental results show that the laser etching technology provides an excellent alternative approach to release silicon micro-cantilever beams from silicon substrate with low cost, high etching rate, precision of operation, and design flexibility, which avoiding convex corner undercutting in etching of micro-cantilevers. This study also provides a new method of laser etching technology for the fabrication of other microstructures.

Paper Details

Date Published: 24 August 2009
PDF: 7 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73811S (24 August 2009); doi: 10.1117/12.834551
Show Author Affiliations
Lu Wang, College of Heilongjiang Province (China)
Heilongjiang Univ. (China)
Dian-zhong Wen, College of Heilongjiang Province (China)
Heilongjiang Univ. (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

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