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Proceedings Paper

ZnO-based material and UV detector
Author(s): Xin Wang; Rong Xiang; Xinglai Zhang; Jingquan Tian; Ye Li; DeLong Jiang; Qingduo Duanmu
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Paper Abstract

ZnO is the most promising material for the application of an ultraviolet (UV) detector. However the shortage of ptype ZnO becomes the biggest blockage for fabricating ZnO-based semiconductor device. In this paper, following experiments had been done: Firstly, the zinc nitride powders were synthesized through the nitridation reaction of Zn power with NH3, and the optimized synthesis temperature was at 600°C. Next, the zinc nitride powder was fabricated into a zinc nitride sputtering target by a single pressing process. Thirdly a thin layer of zinc nitride film was formed on silicon and quartz substrate using magnetron sputtering method. Fourthly, the zinc nitride film was oxidized into p-type ZnO, and the best optimized temperature for forming p-type ZnO by oxidizing Zn3N2 thin film was at 500°C. Lastly, the ohmic contact for p-ZnO and ZnO based detector were fabricated. It was found Al and Ni/Au showed ohmic contact properties to n- Si and p-ZnO, respectively, and the p-ZnO/n-Si junction as a UV detector was feasible.

Paper Details

Date Published: 24 August 2009
PDF: 8 pages
Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 738103 (24 August 2009); doi: 10.1117/12.833339
Show Author Affiliations
Xin Wang, Changchun Univ. of Science and Technology (China)
Rong Xiang, Changchun Univ. of Science and Technology (China)
China Mechanical Equipment Research Academy (China)
Xinglai Zhang, Changchun Univ. of Science and Technology (China)
Jingquan Tian, Changchun Univ. of Science and Technology (China)
Ye Li, Changchun Univ. of Science and Technology (China)
DeLong Jiang, Changchun Univ. of Science and Technology (China)
Qingduo Duanmu, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7381:
International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
Xu-yuan Chen; Yue-lin Wang; Zhi-ping Zhou; Qing-kang Wang, Editor(s)

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