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Proceedings Paper

Research on digital gray-tone projection lithography
Author(s): Jian Wang; Lixin Zhao; Wei Yan; Wnxiang Xu; Song Hu; Xiaoping Tang; Zhaozhi Wang; Shurong Wang; Zhengrong Zhang
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Paper Abstract

With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures.

Paper Details

Date Published: 18 May 2009
PDF: 4 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728417 (18 May 2009); doi: 10.1117/12.832102
Show Author Affiliations
Jian Wang, Institute of Optics and Electronics (China)
Lixin Zhao, Institute of Optics and Electronics (China)
Wei Yan, Institute of Optics and Electronics (China)
Wnxiang Xu, Institute of Optics and Electronics (China)
Song Hu, Institute of Optics and Electronics (China)
Xiaoping Tang, Institute of Optics and Electronics (China)
Zhaozhi Wang, Institute of Optics and Electronics (China)
Shurong Wang, Institute of Optics and Electronics (China)
Zhengrong Zhang, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)

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