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Proceedings Paper

Fabrication of flexible grating sensing waveguide based on nano-imprint lithography and micro-replication process
Author(s): Yueming Liu; Weijian Tian; Shaojun Zhang
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Paper Abstract

Soft and flexible grating sensing waveguides is urgently demanded in application of micro-bending sensing and surface distortion sensing in medical catheter and smart skin sensing unit etc. Based on Nano-imprint Lithography and micro-replication process, polymer grating waveguides with core size 4μm×20μm and pitch 0.75μm are fabricated successfully in this paper. This novel grating waveguides is soft and flexible enough for related application and with the bio-medical safe feature when used in human body catheter. Fabricated processes are presented including the fabrication of micro mould and UV-replication process, and relative skills are discussed also in this paper.

Paper Details

Date Published: 18 May 2009
PDF: 5 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728413 (18 May 2009); doi: 10.1117/12.832098
Show Author Affiliations
Yueming Liu, China Jiliang Univ. (China)
Weijian Tian, Xi'an Institute of Optics and Precision Mechanics (China)
Shaojun Zhang, China Jiliang Univ. (China)


Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems

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