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Proceedings Paper

Increasing the sensitivity of Love wave sensors with thicker waveguide layer by modified spin coating method
Author(s): Jia Hu; Xiosong Du; Guangzhong Xie; Ping Sun; Yadong Jiang
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Paper Abstract

A modified spin coating method is utilized to prepare waveguide layers of Love Wave devices. The thickness of PMMA waveguide layer up to 3.0 μm is obtained with a smooth surface. The properties of these sensors, such as, mass sensitivity, insertion loss are studied as a function of layer thickness. Mass sensitivity up to 705cm2g-1 is demonstrated.

Paper Details

Date Published: 18 May 2009
PDF: 4 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840Z (18 May 2009); doi: 10.1117/12.832094
Show Author Affiliations
Jia Hu, Univ. of Electronic Science and Technology of China (China)
Xiosong Du, Univ. of Electronic Science and Technology of China (China)
Guangzhong Xie, Univ. of Electronic Science and Technology of China (China)
Ping Sun, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)

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