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Proceedings Paper

Micro-structuring of photonic materials by deep-ultraviolet laser
Author(s): Yutang Dai; Desheng Jiang; Gang Xu
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Paper Abstract

157nm deep-ultraviolet laser is considered as one of good 3D micro-structuring tools. In this study, a micro-fabrication system based on the 157 nm laser is conducted to micro-structuring experiments of photonic materials. For laser ablation of fused silica, the ablation rate is about 80nm/pulse under laser fluence of 5 J/cm2. A micro-hole array is produced in silica glass chip, and several 3D microstructures are ablated into SMF-28 optical fibers. Experiments and analysis show that, material removal is dominantly photon-chemical process in case of 157nm laser machining.

Paper Details

Date Published: 18 May 2009
PDF: 6 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840P (18 May 2009); doi: 10.1117/12.832084
Show Author Affiliations
Yutang Dai, Wuhan Univ. of Technology (China)
Desheng Jiang, Wuhan Univ. of Technology (China)
Gang Xu, Wuhan Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)

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