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Proceedings Paper

Simulation on a deformable mirror actuated by microfluidic elements
Author(s): Chao Deng; Hao Wang; Wenzhen Sun
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Paper Abstract

Some primary simulation results on a deformable mirror actuated by microfluidic elements are introduced. Thickness of the membrane is determined firstly by the inner pressure of liquid element. The shape change of membrane with single droplet is analyzed. In a deformable mirror model that includes 91 liquid actuation units, the calculation result of several key points shows the mirror deformation capability. Some unfavorable phenomena in the simulation, such as the fragmentation and local outspread of liquid element, are also introduced because they are helpful for further design.

Paper Details

Date Published: 18 May 2009
PDF: 6 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840H (18 May 2009); doi: 10.1117/12.832075
Show Author Affiliations
Chao Deng, Univ. of Electronic Science and Technology of China (China)
Hao Wang, Univ. of Electronic Science and Technology of China (China)
Wenzhen Sun, College of Sichuan Aerospace Technology (China)


Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)

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