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Proceedings Paper

MEMS testing and applications in automotive and aerospace industries
Author(s): Zhichun Ma; Xuyuan Chen
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Paper Abstract

MEMS technology combines micromachining and integrated circuit fabrication technologies to produce highly reliable MEMS transducers. This paper presents an overview of MEMS transducers applications, particularly in automotive and aerospace industries, which includes inertia sensors for safety, navigation, and guidance control, thermal anemometer for temperature and heat-flux sensors in engine applications, MEMS atomizers for fuel injection, and micromachined actuators for flow control applications. Design examples for the devices in above mentioned applications are also presented and test results are given.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728409 (18 May 2009); doi: 10.1117/12.832067
Show Author Affiliations
Zhichun Ma, Ford Motor Co. (United States)
Xuyuan Chen, Vestfold Univ. College (Norway)


Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems

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