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Proceedings Paper

Studies on PZT membrane resonant gas sensors
Author(s): Wenjing Zhao; Xuesheng Li; Liangfeng Xu; Jun Yao; Limei Xu; Yi Ma
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Paper Abstract

This paper presents a piezoelectric micro-bridge structure as a resonant gas sensor. The proposed micro-sensor is designed to expand the narrow range of frequency changing and make correction convenient for detection. The mechanical performance was simulated to obtain optimum design parameters by finite element method. The relationship between dimensions, layer thickness and resonance frequency is discussed. The results show that resonance frequency increased by about 0.6 MHz with a 8.25e-16 kg mass rise in gas-sensing layer in the frequency range of 8 GHz to 8.5 GHz. Thus, the sensor is very sensitive to the change of membrane mass and this makes it very suitable for concentration sensitive detector. Finally the fabrication process for the sensor suitable for batch fabrication is proposed.

Paper Details

Date Published: 22 May 2009
PDF: 6 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72823G (22 May 2009); doi: 10.1117/12.831037
Show Author Affiliations
Wenjing Zhao, Univ. of Electronic Science and Technology of China (China)
Xuesheng Li, Univ. of Electronic Science and Technology of China (China)
Liangfeng Xu, NOKIA, Ltd. (China)
Jun Yao, Institute of Optics and Electronics (China)
Limei Xu, Univ. of Electronic Science and Technology of China (China)
Yi Ma, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

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