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Proceedings Paper

Study on the methods for ensuring the precision of an x-ray microscope
Author(s): Lingling Zhao; Delin Sun; Peng Liu; Jiasheng Hu
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Paper Abstract

In the latest 20 years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by materials, it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In order to ensure the tolerances of KBA, we take many measures to ensure the high requirements during the installation and adjustment process.

Paper Details

Date Published: 21 May 2009
PDF: 4 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72822N (21 May 2009); doi: 10.1117/12.830993
Show Author Affiliations
Lingling Zhao, Ludong Univ. (China)
Delin Sun, Ludong Univ. (China)
Peng Liu, Chengdu Univ. of Technology (China)
Jiasheng Hu, Dalian Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

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