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Proceedings Paper

Indium-tin oxide conductive films on flexible substrates deposited by the DC magnetron sputtering method
Author(s): Nana Wang; Junsheng Yu; Hui Lin; Shuangling Lou; Yadong Jiang
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Paper Abstract

Indium tin oxide (ITO) films on flexible polyethylene terephthalate (PET) substrates with low square resistivity and high transmittance in visible region are prepared by DC magnetron sputtering deposition method. The dependence of electrical property of ITO films on substrate temperature and DC power is compared using PET and glass substrates. The results imply that the change trend of electrical property of ITO films is similar no matter what kind of substrate is used. Using the ITO-coated substrates as anode, organic light-emitting devices (OLEDs) consisted of PET/ITO/NPB/Alq/Mg:Ag are fabricated. The electroluminescence performance of the flexible devices is comparable to the identical devices made of ITO-coated rigid glass substrates.

Paper Details

Date Published: 21 May 2009
PDF: 5 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72821N (21 May 2009); doi: 10.1117/12.830881
Show Author Affiliations
Nana Wang, Univ. of Electronic Science and Technology of China (China)
Junsheng Yu, Univ. of Electronic Science and Technology of China (China)
Hui Lin, Univ. of Electronic Science and Technology of China (China)
Shuangling Lou, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

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