Share Email Print
cover

Proceedings Paper

Research on high-speed deposition thermodynamics characteristic for DLC thin film by RF-PECVD
Author(s): Mi Zhu; Changxin Xiong; Changcheng Yang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Diamond-like carbon (DLC) thin film is often used on the surface of Infrared windows as the protecting film. PECVD method is one of the principal ways to obtain DLC film. The key factors, which affect the deposition rate of DLC film, and how to achieve high speed rate have been analyzed in this work. We prepared high-speed deposition DLC film samples on Germanium and Silicon by RF-PECVD, and the relationships between deposition rate, RF power, vacuum degree and dimension size of substrates, deposition temperature have been investigated. We found that when the deposition temperature rises, the deposition rate would rise correspondingly but fall down later. According to MIL-48616 environmental stability standards, the environmental and physical durability test results and the curve of spectrum are also presented in detail in the paper.

Paper Details

Date Published: 20 May 2009
PDF: 5 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72821B (20 May 2009); doi: 10.1117/12.830867
Show Author Affiliations
Mi Zhu, Huazhong Institute of Electro-Optics (China)
Changxin Xiong, Huazhong Institute of Electro-Optics (China)
Changcheng Yang, Huazhong Institute of Electro-Optics (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

© SPIE. Terms of Use
Back to Top